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Dual Valve Pressure Controller designed for the Semiconductor Market.
by
Anonymous
July 24, 2004 -- Alicat Scientific, Inc. has announced its introduction to the semiconductor market the revolutionary high speed dual valve pressure controller to aid in pressure control during semiconductor manufacturing. The dual valve pressure controller from ASI is a pressure control device that incorporates two control valves, one upstream and one downstream to provide accurate pressure control in dead ended applications without the use of a manual bleed valve. The dual valve pressure control is able to modulate proportional valves on the source and vent side of the process, concurrently, allowing precise pressure control even with changes in supply pressure. The ASI DVPC offers excellent control stability, typically +/- 0.02% of full scale, custom pressure selection range and a response time so fast that its limiting factor is the time required for the process volume to fill through the inlet valve. The ASI DVPC is a low power unit (consuming 50mA typical) and can be configured for low, moderate and high flow rates. All of these in a user configurable package that offers custom pressure range selection at a price that is comparable with other units that offer much less.
The ASI dual valve pressure controller is made with rugged stainless steel components and contains the same technologically advanced features that are built into Alicat Scientifics' line of precision flow measurement equipment, including patented laminar technology. The DVPC comes standard with organic display and real time readout of control settings and pressure on screen, allowing users to see what is happening in real time. The unit can be set locally via the buttons on the unit or full control and communication can be achieved via RS-232 allowing for fast and simple field repairs resulting in reduced downtime. Alicat dual valve pressure controllers can be set up in a "multi-drop" configuration allowing multiple Alicat units to operate together in a single process all communicating independently to single serial port.
This article courtesy of http://www.cylinder-hydraulic.com.
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